Questions to Ask from Your HSQ Resist Supplier for a Successful EBL Process

Discheminc09 Nov, 2021Business

EBL is a chemical process that utilizes oxygen plasma to oxidize the polymer film. It has been recently explored as a low-cost alternative to e-beam evaporation for patterning thin films without photolithography. The process of?EBL causes decomposition on the surface of the silicon layer formed by vapors during plasma oxidation. Carbon atoms are created on the outermost surface of oxygen plasma. The atoms are then attached to hydrogen,?forming Si-CH3.