Hot Filament Chemical Vapor Deposition: Useful information!!!

Bluewavesemi30 Oct, 2019Other

Hot filament chemical vapor deposition (HFCVD) is one of the most simple and cost-effective ways in which a large variety of materials can be deposited. In this technique, a resistively heated metallic filament like rhenium, tungsten, or tantalum is made use of for catalytically/thermally dissociating the molecules of the source gas that has been introduced with the aim of producing the requisite reactive precursors.