Boron Trichloride, BCL3 Specialty Gas
Boron trichloride (BCL3) is a colorless fuming liquid or gas. Non-flammable, irritating, acidic odor. Boron trichloride (BCl3) is a low vapor pressure gas. The molecule can be used in a wide range of applications, such as drying etching gases used for aluminum wiring in semiconductor and LCD manufacturing. Boron trichloride is a liquefied gas that decomposes in water into hydrogen chloride and boric acid. It is the main gas component in high-K and metal anisotropic plasma etching, atomic layer etching and pulsed plasma etching. BCL3 Gas is also mainly used for fine etching of aluminum circuits in the liquid crystal panel manufacturing process.
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